Welcome to the Nano Green Technology website.

Nano Green Technology Inc. is a technological driven semiconductor equipment manufacturing company, founded and incorporated in late 2004 with patent pending revolutionary technology – a 'paradigm shift" in wafers and devise cleaning process technology that will significantly enhance our customers cleaning performance.

Led by a dedicated team of industry experts who have an in-depth understanding of the challenges faces our industry in moving into complex device structure at 65nm technology and below, Nano Green Technology Inc. is committed to providing superior cleaning-process technology solutions that immediately and dramatically increase yields by enhancing device-cleaning process and drastically improve operational cost by reducing or eliminating the use of chemicals in the traditional SC-1 and SC-2 cleaning process.

While over the past 30 years there were dramatic changes, enhancements and improvements in almost every aspect of the devices design, front-end/back-end process equipment, testing, inspection and metrology, there is one area that remains almost with no change and that is the traditional SC-1 and SC-2 cleaning process.

Nano Green Technology revolutionary cleaning process is the industry breakthrough, the next generation that will change the method of how wafers and devices will be cleaned in the future.