Delivering Unmatched Cleaning Performance

Company Overview

Nano Green Technology Inc.—incorporated in late 2004—is a pioneering technologically driven equipment manufacturing company that provides revolutionary cleaning process solutions for the semiconductor, flat panel display (FPD), and data storage disk drive (DSDD)—to achieve the following:

  • Eliminate oxide etching and protect your devices and topography
  • Achieve unmatched cleaning performance
  • Improve surface roughening—and not damage the surface
  • Create a paradigm shift in processes and technologies
  • Reduce operation costs—drastically
  • Eliminate expensive chemicals used in the traditional SC-1 and SC-2 cleaning processes
  • Revolutionize all cleaning processes and remove nano particles—ionic, organic, or metallic
  • Provide a green--and safe—environment—without any waste

In the last 30 years, there have been dramatic changes, enhancements, and improvements in almost every aspect of device designs, front-end and back-end process equipment, testing, inspection, and metrology; however, there have been no changes in the traditional SC-1 and SC-2 cleaning process.

Now, led by a dedicated team of industry experts who have in-depth knowledge and experience in the challenges that our industry faces, Nano Green Technology’s experts have invented—the first breakthrough in the cleaning industry—to radically change the way wafers and devices are cleaned—now—and in the future.

For more information to solve your cleaning problems, go to